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A*STAR
A*STAR

Research Engineer/Senior Research Engineer (MEMS), IME

Institute of Microelectronics

Location

Singapore

Department

Institute of Microelectronics

Posted

2 months before

Full Job Description

Job Description

The Micro Electro Multiphysical systems (MEMS) team is looking for a MEMS fabrication process integrator. The research engineer will work with a multidisciplinary team to develop processes for the fabrication of MEMS-based ultrasonic transducer; RF devices and other devices based on piezo materials, such as PZT and ScAlN films.

Job Responsibilities:

  • Work with design and process module team to develop integration platforms based on PZT, ScAlN films, and other piezo materials.
  • Design integration process flows for up coming piezoelectric MEMS devices, design and execute DOEs to realize the devices.
  • Conduct integration and fabrication of thin-film piezoelectric ultrasonic transducers, acoustic devices and RF devices.
  • Manage wafer lot progress in the cleanroom, conduct inspection and characterization of MEMS devices/structures and failure analysis, using metrology tools such as DRSEM, CDSEM, ellipsometers, and microscopes.
  • Communicate with internal and external customers on the project progress and manage the project execution.

Job Requirements:

  • BS/MS in Electronics Engineering/Chemical Engineering/Mechanical Engineering/Material Engineering/Applied Physics or equivalent.
  • At least 3 years' experience in semiconductor process modules, integration or MEMS related modules and integration.
  • Good knowledge and hands on experience on microfabricaon processes (e.g. etch, lithography, CMP, PVD and PECVD), process recipe tuning experience is a plus.
  • Good knowledge and hands on experience on microfabricaon inspection and characterization methods, and data analysis of wafer-level measurements.
  • Good communication and presentation skills, ability to work independently, as well as being an excellent team player.
  • Continuously seeks opportunities to expand knowledge and skills, staying up to date with emerging trends and advancements in the field.
  • Capable of conceptualizing and implementing creative approaches to address research questions and technology development.