Senior Engineer for Ion Implantation Process (APM), IME

About This Role

A*STAR IME seeks a Senior Engineer for the Ion Implantation Process (APM) role to develop and validate ion implantation recipes, optimize post-implant annealing for dopant activation, analyze defects and channeling data, and coordinate equipment operations.

Responsibilities

• Support the development of ion implantation recipes to achieve targeted dopant profiles while minimizing lattice damage.
• Optimize post-implant annealing conditions to maximize electrical dopant activation while minimizing residual lattice damage.
• Analyze implant-induced defects using experimental data and simulations to contribute to defect suppression strategies.
• Design and execute ion-implantation experiments with systematic variation of dose, energy, tilt, and rotation.
• Review work orders, support equipment operators in resolving process-related issues, and collaborate with vendors to improve tool performance.
• Conduct quantitative analysis of SIMS depth profiles, sheet-resistance (Rs) measurements, and RBS/channeling data to correlate process conditions.

Requirements

• Bachelor's or Master's degree in Electrical Engineering, Materials Science, Physics, or a related field.
• Basic understanding of solid-state physics, including ion implantation processes and dopant activation, familiarity with defect formation and recovery in semiconductors.
• Experience or academic exposure to process characterization and data analysis (SIMS, Rs, RBS/channeling).
• Familiarity with process simulation tools (e.g., SRIM/TRIM, Silvaco, Sentaurus Process).
• Candidates with no experience may apply.