Senior Research Engineer, CMP (FAB), IME

Job Description

The CMP Engineer supports translational semiconductor research by bridging advanced material integration and planarization process development with industry-relevant manufacturing practices. The role focuses on operational engineering control of CMP platforms within a research fab or pilot line environment, ensuring process robustness, repeatability, and scalability for transfer to industrial partners.

The position plays a key role in enabling integration schemes, yield improvement, and surface planarization strategies for advanced devices, while maintaining operational discipline comparable to leading semiconductor manufacturing fabs.

Roles & Responsibilities

1. CMP Operations & Process Control

• Own day-to-day operational engineering control of CMP processes in research, pilot, or pre-production environments.
• Establish and maintain process control frameworks (SPC, control plans, excursion management, process limits) that balance research flexibility with manufacturing discipline.
• Monitor and control CMP KPIs including removal rate, within-wafer non-uniformity (WIWNU), within-lot variation, planarity, defectivity (scratches, particles), and dishing/erosion.
• Perform rapid troubleshooting, root cause analysis, and corrective actions to maintain tool uptime and experimental reliability.

2. Translational Research Enablement

• Enable research-to-manufacturing transition by ensuring CMP processes are scalable, stable, and integration-ready.
• Support co-developed experiments with industry partners, including advanced patterning stacks and multi-layer integration schemes.
• Provide engineering guidance to researchers on process trade-offs involving planarity, selectivity, and integration complexity.

3. Tool Performance, Process Setup & Capability Development

• Support CMP tool qualification, baseline setup, and process matching across platforms and modules.
• Collaborate with Equipment Engineering and vendors on platen/head performance, slurry delivery systems, pad conditioning, and hardware optimization.
• Support introduction of new consumables (slurries, pads, conditioners), tool upgrades, and experimental configurations with appropriate risk assessment.

Job Description

4. Process Sustainment, Data Analysis & Improvement

• Sustain qualified CMP processes while enabling controlled experimentation through process window characterization and drift monitoring.
• Analyze experimental and inline metrology data (e.g., thickness, topography, defect inspection) to identify systematic trends and yield limiters.
• Drive continuous improvement initiatives to enhance planarity performance, defect reduction, process stability, and throughput.

5. Industry Collaboration & Technology Transfer

• Work closely with industry partners to align CMP processes, consumables, and integration strategies with manufacturing requirements.
• Support technology transfer activities including process documentation, baseline definition, and readiness assessment for partner fabs.
• Participate in technical reviews, cross-functional meetings, and joint problem-solving efforts with internal teams and external collaborators.

6. Documentation, Governance & Knowledge Sharing

• Maintain comprehensive process documentation, standard operating procedures, and experimental run plans.
• Generate clear engineering reports summarizing process performance, integration risks, and recommendations.
• Contribute to best practices for CMP module operation within research and industry-engaged programs.

4. Process Sustainment, Data Analysis & Improvement

• Sustain qualified CMP processes while enabling controlled experimentation through process window characterization and drift monitoring.
• Analyze experimental and inline metrology data (e.g., thickness, topography, defect inspection) to identify systematic trends and yield limiters.
• Drive continuous improvement initiatives to enhance planarity performance, defect reduction, process stability, and throughput.

5. Industry Collaboration & Technology Transfer

• Work closely with industry partners to align CMP processes, consumables, and integration strategies with manufacturing requirements.
• Support technology transfer activities including process documentation, baseline definition, and readiness assessment for partner fabs.
• Participate in technical reviews, cross-functional meetings, and joint problem-solving efforts with internal teams and external collaborators.

6. Documentation, Governance & Knowledge Sharing

• Maintain comprehensive process documentation, standard operating procedures, and experimental run plans.
• Generate clear engineering reports summarizing process performance, integration risks, and recommendations.
• Contribute to best practices for CMP module operation within research and industry-engaged programs.

4. Process Sustainment, Data Analysis & Improvement

• Sustain qualified CMP processes while enabling controlled experimentation through process window characterization and drift monitoring.
• Analyze experimental and inline metrology data (e.g., thickness, topography, defect inspection) to identify systematic trends and yield limiters.
• Drive continuous improvement initiatives to enhance planarity performance, defect reduction, process stability, and throughput.

5. Industry Collaboration & Technology Transfer

• Work closely with industry partners to align CMP processes, consumables, and integration strategies with manufacturing requirements.
• Support technology transfer activities including process documentation, baseline definition, and readiness assessment for partner fabs.
• Participate in technical reviews, cross-functional meetings, and joint problem-solving efforts with internal teams and external collaborators.

6. Documentation, Governance & Knowledge Sharing

• Maintain comprehensive process documentation, standard operating procedures, and experimental run plans.
• Generate clear engineering reports summarizing process performance, integration risks, and recommendations.
• Contribute to best practices for CMP module operation within research and industry-engaged programs.

Requirements

Required Qualifications

• Bachelor’s degree or higher in Chemical Engineering, Materials Science, Mechanical Engineering, Electrical Engineering, or related disciplines.
• 3–5 years of experience in CMP processes, ideally in semiconductor manufacturing, pilot lines, or applied R&D environments.
• Strong understanding of CMP fundamentals: material removal mechanisms, slurry chemistry, pad behavior, selectivity, and defect control.
• Experience in process control (SPC, DOE, excursion management) and operations-focused engineering.
• Proficiency in data analysis tools (e.g., JMP, Python, Excel).

Preferred / Added Advantages

• Hands-on experience with advanced CMP platforms (e.g., multi-platen tools, integrated metrology).
• Familiarity with advanced node integration challenges (e.g., STI, FinFET, GAA, BEOL planarization).
• Experience working with slurry and pad suppliers, consumable qualification, and co-optimization.
• Knowledge/ Experience of AFM metrology
• Exposure to industry–research collaborations, JDPs, or technology transfer projects.
• Strong communication skills across research, engineering, and industry stakeholders.

Key Attributes for Success

• Strong integration and manufacturing mindset in a research environment
• Ability to balance process discipline with experimental agility
• Structured, data-driven problem solving approach
• Collaborative and industry-oriented mindset
• High ownership and reliability in cross-functional, high-visibility programs