About the role
Senior/Lead Research Engineer responsible for sustaining daily operations, ensuring stable tool performance, and maintaining high process reliability for ion implantation and rapid thermal annealing processes, leveraging data analytics and AI/ML techniques.
ResearchOnsiteInstitute of Microelectronics
Key Responsibilities
- Monitor and maintain Implant/RTA performance using SPC, structured analytics, and data‑driven fault detection methods
- Develop statistical models or machine learning workflows to predict drift, equipment degradation, or anomalous behaviour
- Build automated dashboards for dose uniformity, activation yield, chamber stability, and thermal cycle repeatability
- Perform DOE studies to identify key parameters impacting junction control, leakage, and defectivity
- Maintain and improve process recipes for dose control, energy accuracy, tilt/twist angles, anneal temperature profiles, and soak times
- Ensure day‑to‑day process SPC stability, addressing out‑of‑control conditions and yield‑impacting trends
Requirements
- Bachelor's or Master's degree in Electrical Engineering, Materials Science, Chemical Engineering, Physics, or related field
- Relevant experience with ion implantation (high current, medium current, high energy)
- Experience with RTA/RTP systems (spike anneal, soak, millisecond anneal)
- Basic understanding of epitaxy concepts (dopant incorporation, epi quality, film stress)
- Strong understanding of equipment fundamentals such as vacuum systems, plasma physics (implant), and lamp/thermal systems (RTA)
- Proficiency in data analytics using