A*STAR

Lithography Process Lead Engineer, FAB, IME

A*STAR
ResearchSingaporeOnsitePosted 2 weeks ago

About the role

We are seeking an experienced Lithography Process Engineer to support day-to-day lithography operations in a research institute cleanroom facility focused on translational research and industry collaboration.

ResearchOnsiteInstitute of Microelectronics

Key Responsibilities

  • Own daily operation of dry and immersion lithography tools, ensuring high uptime, process stability, and manufacturability
  • Execute production and customer wafers according to agreed process flows, specifications, and schedules
  • Monitor critical lithography metrics such as CD, overlay, focus, dose, defectivity, and tool matching
  • Perform routine process setup, qualification, calibration, and release for supported layers
  • Support tool-to-tool matching and baseline control across lithography platforms
  • Implement and maintain SPC, FDC, and run-to-run control strategies for lithography

Requirements

  • Bachelor's or Master's degree in Electrical Engineering, Materials Science, Physics, Chemical Engineering, or related discipline
  • 7–10 years of hands-on lithography experience in semiconductor manufacturing or advanced R&D fabs
  • Proven experience supporting both dry and immersion lithography in an operational environment
  • Background in logic, memory, or advanced-node R&D/manufacturing is preferred
  • Strong understanding of photoresist processes, optical lithography fundamentals, immersion-specific challenges
  • Hands-on experience with lithography exposure tools, resist tracks, SPC, FDC, process qualification, tool matching, CD-SEM, overlay metrology, defect inspection tools